Hosted on MSN
Temperature Control in Lithography
Optical lithography is employed in manufacturing integrated circuits. It starts with attaching a photosensitive material—or photoresist—to the substrate. A photomask with the required pattern is ...
Abstract: Laser cladding is a multiple-parameter-dependent process, and a feedback control is critical for the process stabilization. This paper presents a generalized predictive control strategy with ...
Abstract: In the aerospace applications the investigation of the physical properties of the materials used as thermal protection systems (TPS) is mandatory. One of the most important material ...
Some results have been hidden because they may be inaccessible to you
Show inaccessible results