Abstract: In this article, the effect of starting layer on the ferroelectric properties and reliability of HfO2-ZrO2-HfO2 (HZH) and ZrO2-HfO2-ZrO2 (ZHZ) superlattice (SL) films were systematically ...
Abstract: This article reports the time-dependent dielectric breakdown (TDDB) reliability of zirconia (ZrO2)-based MIM capacitors with sub-0.7-nm equivalent oxide thicknesses (EOT). Results indicate ...
Chemical Engineering Department, College of Engineering, King Saud University, P.O. Box 800, Riyadh 11421, Saudi Arabia ...
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